Collection: Products

MIRRA TITAN I / TITAN II E-CHAIN ASSY, UPA ELECTRONICS

REFURBISHED, TITAN HEAD, 8", ( CORE PROVIDED BY ENTREPIX )

HEAD TESTER, APPLIED MATERIALS - USED ( PLEASE CONTACT PARTS@ENTREPIX.COM FOR PRICE )

Head Tester - CLICK HERE

Head Tester Video - CLICK HERE

OBSOLETE USE ALTERNATE 340-120-11525 SPINDLE TITAN HEAD CLAMP

OBSOLETE USE ALTERNATE 340-120-11525 MIRRA HEAD CLAMP (LATEST REVISION )

ASSY, CROSS HUB, REFURBISHED READY TO SHIP (NO CORE RECEIVED)

Mirra Cross Hub Refurbishment - CLICK HERE

Mirra Cross Hub Refurbishment Video - CLICK HERE

ASSY, CROSS HUB - REFURBISHED

Mirra Cross Hub Refurbishment - CLICK HERE

Mirra Cross Hub Refurbishment Video - CLICK HERE

MIRRA HCLU 200MM LOADCUP REFURBISHEDWITH ASSEMBLY TEFLON COATING  READY TO SHIP UNIT.  EXCHANGE, ( CUSTOMER EXCHANGE CORE RECEIVED AFTER PART SHIPMENT )

HCLU Refurbishment Brochure - CLICK HERE

HCLU Refurbishment Video - CLICK HERE

MIRRA HCLU 200MM LOADCUP,  WITH ASSEMBLY TEFLON COATING  - REFURBISHMENT SERVICE

HCLU Refurbishment Brochure - CLICK HERE

HCLU Refurbishment Video - CLICK HERE

REFURBISHED MIRRA HCLU 200MM LOADCUP PURCHASED OUTRIGHT

MIRRA HEAD ROTATION SPINDLE, REFURBISHED EXCHANGE ASSY.

Mirra Rotation Spindle Refurbishment - CLICK HERE

Mirra Rotation Spindle Refurbishment Video - CLICK HERE

MIRRA HEAD ROTATION SPINDLE - REFURBISHMENT SERVICE

Mirra Rotation Spindle Refurbishment - CLICK HERE

Mirra Rotation Spindle Refurbishment Video - CLICK HERE

OBSOLETE - SEE 340-120-10631 WAFER LOSS SENSOR ASSY

Wafer Loss Sensor Silicon Substrate Upgrade - CLICK HERE

Wafer Loss Sensor Silicon Substrate Upgrade Video - CLICK HERE

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-120-10712. ASSY, CHASSIS, SLURRY DISPENSE ARM

PLEASE SEE ENTREPIX UPGRADE 340-120-11518 , ASSY, 2 PHASE DRIVER FOR WET ROBOT ARM

Mirra Wet Robot Refurbishment & Upgrade - CLICK HERE

Mirra Wet Robot Refurbishment & Upgrade Video - CLICK HERE

Mirra Wet Robot Motor Driver Upgrade - CLICK HERE

Mirra Wet Robot Motor Driver Upgrade Video - CLICK HERE

OBSOLETE - USE 340-120-11273 ASSY, 8" TITAN II PROFILER HEAD

4 Zone Profiler Head - CLICK HERE

4 Zone Profiler Head Video - CLICK HERE

OBSOLETE USE 340-120-11525 MIRRA HEAD TO SPINDLE CLAMP

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-120-10678 - ENTREPIX TITAN / PROFILER REG. UPGRADE ASSY. REQUIRES UPGRADED PCB 340-140-10599

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-120-10678. ENTREPIX TITAN / PROFILER REG. UPGRADE ASSY. REQUIRES UPGRADED PCB 340-140-10599

HARMONIC DRIVE BASE ASSY MIRRA PAD CONDITIONER  BASE, ALSO USE ENTREPIX UPGRADE 340-120-11312

*SEE UPGRADE* MIRRA PAD CONDITIONER HEAD BALL SLEEVE ( SEE UPGRADE 340-130-11767 PLEASE USE UPGRADE  WHEN 0015-77087 IS RUN OUT )

MIRRA HCLU PEDESTAL DISK NOZZLE

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-340-11057. ENTREPIX DDF3 SILICONE HEAD DIAPHRAGM

OBSOLETE - SEE ENTREPIX REPLACEMENT UPGRADE 340-130-10449. DDF3 PAD CONDITIONER HEAD FLANGE INSERT