Collection: AMAT Mirra

ASSY, CHASSIS, SLURRY DISPENSE ARM, HIGH PRESSURE RINSE ARM, HPR

MIRRA, MESA, ONTRACK, FABS DRY ROBOT (RORZE) REFURBISHED, EXCHANGE ASSEMBLY READY FOR SHIPPING FOR CUSTOMERS CORE ( CARBON FIBER BLADE NOT INCLUDED )

ASSY, DDF3 PAD CONDITIONER, TEFLON COATED, SIGMA 7

Upgraded Pad Conditioner - CLICK HERE

Pad Conditioner Teflon Coating - CLICK HERE

Pad Conditioner Upgrade Video - CLICK HERE

Entrepix Quarterly Pad Conditioner Service Video - CLICK HERE

REFURBISHED MIRRA HCLU 200MM LOADCUP PURCHASED OUTRIGHT

MIRRA HEAD ROTATION SPINDLE - REFURBISHMENT SERVICE

Mirra Rotation Spindle Refurbishment - CLICK HERE

Mirra Rotation Spindle Refurbishment Video - CLICK HERE

ENTREPIX UPGRADED MIRRA LOWER PNEUTRONICS PCB

KIT, REBUILD FIXTURE, 8" TITAN II HEAD, PROFILER

4 Zone Profiler Head - CLICK HERE

4 Zone Profiler Head Video - CLICK HERE

Product Brochure - Hand Tools - CLICK HERE

MIRRA TITAN I / TITAN II E-CHAIN ASSY, UPA ELECTRONICS

REFURBISHED, TITAN HEAD, 8", ( CORE PROVIDED BY ENTREPIX )

OBSOLETE USE ALTERNATE 340-120-11525 SPINDLE TITAN HEAD CLAMP

OBSOLETE USE ALTERNATE 340-120-11525 MIRRA HEAD CLAMP (LATEST REVISION )

ASSY, CROSS HUB, REFURBISHED READY TO SHIP (NO CORE RECEIVED)

Mirra Cross Hub Refurbishment - CLICK HERE

Mirra Cross Hub Refurbishment Video - CLICK HERE

ASSY, CROSS HUB - REFURBISHED

Mirra Cross Hub Refurbishment - CLICK HERE

Mirra Cross Hub Refurbishment Video - CLICK HERE

MIRRA HCLU 200MM LOADCUP REFURBISHEDWITH ASSEMBLY TEFLON COATING  READY TO SHIP UNIT.  EXCHANGE, ( CUSTOMER EXCHANGE CORE RECEIVED AFTER PART SHIPMENT )

HCLU Refurbishment Brochure - CLICK HERE

HCLU Refurbishment Video - CLICK HERE

MIRRA HCLU 200MM LOADCUP,  WITH ASSEMBLY TEFLON COATING  - REFURBISHMENT SERVICE

HCLU Refurbishment Brochure - CLICK HERE

HCLU Refurbishment Video - CLICK HERE

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-120-10712. ASSY, CHASSIS, SLURRY DISPENSE ARM

OBSOLETE - USE 340-120-11273 ASSY, 8" TITAN II PROFILER HEAD

4 Zone Profiler Head - CLICK HERE

4 Zone Profiler Head Video - CLICK HERE

OBSOLETE USE 340-120-11525 MIRRA HEAD TO SPINDLE CLAMP

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-120-10678 - ENTREPIX TITAN / PROFILER REG. UPGRADE ASSY. REQUIRES UPGRADED PCB 340-140-10599

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-120-10678. ENTREPIX TITAN / PROFILER REG. UPGRADE ASSY. REQUIRES UPGRADED PCB 340-140-10599

HARMONIC DRIVE BASE ASSY MIRRA PAD CONDITIONER  BASE, ALSO USE ENTREPIX UPGRADE 340-120-11312

*SEE UPGRADE* MIRRA PAD CONDITIONER HEAD BALL SLEEVE ( SEE UPGRADE 340-130-11767 PLEASE USE UPGRADE  WHEN 0015-77087 IS RUN OUT )

MIRRA HCLU PEDESTAL DISK NOZZLE

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-340-11057. ENTREPIX DDF3 SILICONE HEAD DIAPHRAGM