Collection: Products

ITV HEAD PNEUMATIC ER45 UC CABLE, UPA ELECTRONICS

Mirra UPA Upgrade - CLICK HERE

Mirra UPA Upgrade Video - CLICK HERE

ITV HEAD PNEUMATIC ER42 EC /PP CABLE, UPA ELECTRONICS

Mirra UPA Upgrade - CLICK HERE

Mirra UPA Upgrade Video - CLICK HERE

WAFER LOSS, WAFER SLIP, SENSOR, ENTREPIX UPGRADE

Wafer Loss Sensor Silicon Substrate Upgrade - CLICK HERE

Wafer Loss Sensor Silicon Substrate Upgrade Video - CLICK HERE

KIT, PRESSURE MONITOR, RPM4 (30PSI) GAUGE

Product Brochure - Hand Tools - CLICK HERE

KIT,150MM, 24K, TITAN HEAD CONSUMABLE,WAFER BREAKAGE

KIT,150MM, 2K, TITAN HEAD CONSUMABLE, WAFER BREAKAGE

ENTREPIX TITAN / PROFILER REGULATOR UPGRADE ASSY. UPA REQUIRES UPGRADED PCB 340-140-10599

Mirra UPA Upgrade - CLICK HERE

Mirra UPA Upgrade Video - CLICK HERE

ASSY, BURKERT UPA SOLENOID VALVE, UPA ELECTRONICS

Mirra UPA Upgrade - CLICK HERE

Mirra UPA Upgrade Video - CLICK HERE

MOTOR AND DRIVER HEAD SWEEP ONE SPINDLE UPGRADE KIT (MOTOR AND DRIVER MUST BE REPLACED TOGETHER, NOT COMPATIBLE WITH OEM MOTOR OR DRIVER)

Head Sweep Motor & Driver Video - CLICK HERE

Head Sweep Motor & Driver Brochure - CLICK HERE

ENTREPIX STANDARD FLOW RATE SLURRY PUMP #24 TBG, FOR AMAT MIRRA CMP ( APPROX. 100 ML/MIN - 500 ML/MIN )

ENTREPIX SLIP RING WITH HARNESS, FOR PLATEN FULL SCAN ISRM, SIX TERM, CONNECTORS

SLIP RING BOOT KIT

MIRRA WET ROBOT SHOULDER HOME SENSOR ASSY.

Mirra Wet Robot Refurbishment & Upgrade

Mirra Wet Robot Refurbishment & Upgrade Video

200MM TITAN HEAD 24K REBUILD KIT

Mirra Head Rebuild Kit - CLICK HERE

Mirra Head Rebuild Kit Video - CLICK HERE

200MM TITAN HEAD 2K REBUILD KIT

Mirra Head Rebuild Kit - CLICK HERE

Mirra Head Rebuild Kit Video - CLICK HERE

MIRRA, KIT, PAD CONDITIONER CALIBRATION DOWN FORCE FIXTURES, UNIVERSAL 3 SCREW

WAFER LOSS SENSOR, WAFER SLIP SENSOR, REPLACEMENT ASSY ENTREPIX UPGRADED W/O BRACKET

Wafer Loss Sensor Silicon Substrate Upgrade - CLICK HERE

Wafer Loss Sensor Silicon Substrate Upgrade Video - CLICK HERE

ASSY POLISHER LIGHT TOWER 3 LIGHT (R-G-Y) W MOUNT FOR MIRRA POLISHER

ASSY,TITAN HEAD,150MM,WAFER BREAKAGE REDUCTION

ASSY, CHASSIS, SLURRY DISPENSE ARM, HIGH PRESSURE RINSE ARM, HPR

COMPLETE LOAD CELL AND FIXTURE KIT FOR MIRRA PAD CONDITIONER DOWN FORCE

Product Brochure - Hand Tools - CLICK HERE

BLADE UPGRADE GASKET KIT FOR MIRRA WET ROBOT, WAFER BREAKAGE REDUCTION

Mirra Wet Robot Refurbishment & Upgrade - CLICK HERE

Mirra Wet Robot Refurbishment & Upgrade Video - CLICK HERE

Mirra Wet Robot Blade Pad - CLICK HERE

MIRRA 68 PIN SCSI HD CABLE ASSY