Collection: Products

ENTREPIX 200MM PROFILER HEAD ASSY

4 Zone Profiler Head - CLICK HERE

4 Zone Profiler Head Video - CLICK HERE

MIRRA WET ROBOT, X AXIS, DRIVEN SIDE, PULLEY ASSEMBLY

Mirra Wet Robot Refurbishment & Upgrade

Mirra Wet Robot Refurbishment & Upgrade Video

MIRRA WET ROBOT, X AXIS IDLER SIDE

ASSY, HARMONIC DRIVE, DDF3 PAD CONDITIONER BASE (200MM AND 300MM)

ASSY, ETPX REMOTE UPA UPGRADE ( WITHOUT UPA ELECTRONICS )

Remote UPA Upgrade - CLICK HERE

Remote UPA Upgrade Video - CLICK HERE

Mirra UPA Upgrade - CLICK HERE

Mirra UPA Upgrade Video - CLICK HERE

ENTREPIX HEAD SWEEP DRIVER BRACKET ASSEMBLY

Head Sweep Motor & Driver Video - CLICK HERE

Head Sweep Motor & Driver Brochure - CLICK HERE

ENTREPIX ROTATION HEAD MOTOR / DRIVER COMBO UPGRADE WITH UPA BRACKET

Head Rotation Motor & Driver - CLICK HERE

Head Rotation Motor & Driver Video - CLICK HERE

ASSY, WET ROBOT DOOR, LEFT ( SLIDING WINDOW )

ASSY, WET ROBOT DOOR, RIGHT ( SLIDING WINDOW )

ENTREPIX HEAD SWEEP MOTOR UPGRADE ASSEMBLY MOTOR AND DRIVER MUST BE REPLACED TOGETHER, NOT COMPATIBLE WITH OEM MOTOR OR DRIVER)

Head Sweep Motor & Driver Video - CLICK HERE

Head Sweep Motor & Driver Brochure - CLICK HERE

ENTREPIX, MIRRA WET ROBOT ARM DRIVER UPGRADE KIT

Mirra Wet Robot Refurbishment & Upgrade - CLICK HERE

Mirra Wet Robot Refurbishment & Upgrade Video - CLICK HERE

Mirra Wet Robot Motor Driver Upgrade - CLICK HERE

Mirra Wet Robot Motor Driver Upgrade Video - CLICK HERE

MIRRA ENTREPIX CARBON FIBER STAND ALONE WET ROBOT BLADE AND GASKET, END EFFECTOR

Entrepix Mirra Carbon Fiber Blade Brochure -  CLICK HERE

Entrepix Mirra Carbon Fiber Blade Video - CLICK HERE

ASSY, HEAD CLAMP, TITAN, SPINDLE, MIRRA AND REFLEXION

Product Brochure - Hand Tools - CLICK HERE

MIRRA PAD CONDITIONER HEAD TEFLON COATING READY TO SHIP EXCHANGE SERVICE

Pad Conditioner Teflon Coating - CLICK HERE

Pad Conditioner Teflon Coating Video - CLICK HERE

Entrepix Concierge Quarterly Pad Conditioner Service Video - CLICK HERE

MIRRA SLURRY FLOW MONITORING UPGRADE KIT 1 SLURRY TYPE 3 PLATENS,  ( CALL OR EMAIL PARTS TO ADD ADDITIONAL FLOW SENSORS, UP TO 6 LINES )

Mirra Slurry Flow Monitoring Upgrade - CLICK HERE

ENTREPIX PAD CONDITIONER SWEEP MOTOR UPGRADE

HEAD TESTER, GEN 2, 8 ZONE

TITAN HEAD, 200MM, TESTED WITH STANDARD CONSUMABLES

ENTREPIX PAD CONDITIONER MOTOR DRIVER UPGRADE

DI WATER CLEAN SPRAY SYSTEM FOR MIRRA POLISHER, UPGRADE KIT

ENTREPIX HEAD TESTER, GEN 2, 6 ZONE

ENTREPIX PAD CONDITIONER ROTATION MOTOR UPGRADE

ASSEMBLY, HCLU, MIRRA

OVERRIDE SWITCH, PAD CONDITIONER DISK POS, 300MM PLI/REFLEXION