Collection: AMAT Mirra

OBSOLETE - SEE ENTREPIX REPLACEMENT UPGRADE 340-130-10449. DDF3 PAD CONDITIONER HEAD FLANGE INSERT

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-340-10629. JAW SEAL

OBSOLETE USE ENTREPIX UPGRADE REPLACEMENT PART: 340-130-11301. STEEL SHAFT

OBSOLETE - SEE ENTREPIX REPLACEMENT 0020-79222. DIAPHRAM SEAL

CARBON FIBER UPGRADE OPTION ALSO AVAILABLE 340-130-11466 - FABS CERAMIC ROBOT BLADE, ENDEFFECTOR 303FN-1196-1

OBSOLETE - SEE ENTREPIX REPLACEMENT UPGRADE 340-130-10460. TRAVEL HUB SHAFT

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-130-11086 - JAM NUT WET ROBOT Z AXIS LEAD SCREW

PLATEN WINDOW, ENDPOINT

***OBSOLETE, SEE 340-130-11363*** PAD CONDITIONER BASE GASKET (ADHESIVE BACKED VERSION ALSO AVAILABLE  - PART 340-130-11363)

OBSOLETE - USE ENTREPIX UPGRADE 340-130-11053 COVER, ARM HOUSING

OBSOLETE PART NUMBER -SEE ENTREPIX UPGRADE REPLACEMENT 340-340-10296. GASKET, ROBOT BLADE

Mirra Wet Robot Blade Pad - CLICK HERE

DIAPHRAM ROLLING UPPER 8" TITAN HEAD (RETAINING RING DIA.)

6" HCLU JAWS WAFER HOLDER

OBSOLETE USE 340-130-10797 BRACKET LOCK

OBSOLETE USE PART 340-130-10680. 200MM SPLASH GUARD, CLEAR, POLYCARBONATE

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-340-10317. BELLOWS, HCLU, UP REV'D

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-130-10895. TITAN HEAD GIMBAL ROD, 200mm

OBSOLETE PLEASE USE 340-130-10803, GIMBAL FLEXURE, PPS, TITAN I, OXIDE

SENSOR VALVE FOR TITAN HEAD

SENSOR PLUNGER FOR TITAN 150MM

GIMBAL SEAL, HEAD ASSY

OBSOLETE - SEE ENTREPIX UPGRADE REPLACEMENT 340-130-10451. DDF3 BEARING CLAMP

OBSOLETE - SEE ENTREPIX UPGRADE REPLACEMENT 340-130-10527. BEARING SPACER, OUTER

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-130-10667. OUTER BEARING SPACER, SHAFT GEAR