Collection: AMAT Mirra

ITV HEAD PNEUMATIC ER44 RETAINING RING CABLE, UPA ELECTRONICS RR

Mirra UPA Upgrade - CLICK HERE

Mirra UPA Upgrade Video - CLICK HERE

ITV HEAD PNEUMATIC ER45 UC CABLE, UPA ELECTRONICS

Mirra UPA Upgrade - CLICK HERE

Mirra UPA Upgrade Video - CLICK HERE

ITV HEAD PNEUMATIC ER42 EC /PP CABLE, UPA ELECTRONICS

Mirra UPA Upgrade - CLICK HERE

Mirra UPA Upgrade Video - CLICK HERE

WAFER LOSS, WAFER SLIP, SENSOR, ENTREPIX UPGRADE

Wafer Loss Sensor Silicon Substrate Upgrade - CLICK HERE

Wafer Loss Sensor Silicon Substrate Upgrade Video - CLICK HERE

KIT, PRESSURE MONITOR, RPM4 (30PSI) GAUGE

Product Brochure - Hand Tools - CLICK HERE

KIT,150MM, 24K, TITAN HEAD CONSUMABLE,WAFER BREAKAGE

KIT,150MM, 2K, TITAN HEAD CONSUMABLE, WAFER BREAKAGE

ENTREPIX TITAN / PROFILER REGULATOR UPGRADE ASSY. UPA REQUIRES UPGRADED PCB 340-140-10599

Mirra UPA Upgrade - CLICK HERE

Mirra UPA Upgrade Video - CLICK HERE

ASSY, BURKERT UPA SOLENOID VALVE, UPA ELECTRONICS

Mirra UPA Upgrade - CLICK HERE

Mirra UPA Upgrade Video - CLICK HERE

ENTREPIX STANDARD FLOW RATE SLURRY PUMP #24 TBG, FOR AMAT MIRRA CMP ( APPROX. 100 ML/MIN - 500 ML/MIN )

ENTREPIX SLIP RING WITH HARNESS, FOR PLATEN FULL SCAN ISRM, SIX TERM, CONNECTORS

SLIP RING BOOT KIT

MIRRA WET ROBOT SHOULDER HOME SENSOR ASSY.

Mirra Wet Robot Refurbishment & Upgrade

Mirra Wet Robot Refurbishment & Upgrade Video

200MM TITAN HEAD 24K REBUILD KIT

Mirra Head Rebuild Kit - CLICK HERE

Mirra Head Rebuild Kit Video - CLICK HERE

200MM TITAN HEAD 2K REBUILD KIT

Mirra Head Rebuild Kit - CLICK HERE

Mirra Head Rebuild Kit Video - CLICK HERE

MIRRA, KIT, PAD CONDITIONER CALIBRATION DOWN FORCE FIXTURES, UNIVERSAL 3 SCREW

WAFER LOSS SENSOR, WAFER SLIP SENSOR, REPLACEMENT ASSY ENTREPIX UPGRADED W/O BRACKET

Wafer Loss Sensor Silicon Substrate Upgrade - CLICK HERE

Wafer Loss Sensor Silicon Substrate Upgrade Video - CLICK HERE

ASSY POLISHER LIGHT TOWER 3 LIGHT (R-G-Y) W MOUNT FOR MIRRA POLISHER

ASSY,TITAN HEAD,150MM,WAFER BREAKAGE REDUCTION

COMPLETE LOAD CELL AND FIXTURE KIT FOR MIRRA PAD CONDITIONER DOWN FORCE

Product Brochure - Hand Tools - CLICK HERE

BLADE UPGRADE GASKET KIT FOR MIRRA WET ROBOT, WAFER BREAKAGE REDUCTION

Mirra Wet Robot Refurbishment & Upgrade - CLICK HERE

Mirra Wet Robot Refurbishment & Upgrade Video - CLICK HERE

Mirra Wet Robot Blade Pad - CLICK HERE

MIRRA 68 PIN SCSI HD CABLE ASSY

NEW 6" FABS CASS FRONT FEET

MIRRA HEAD REBUILD TOOL KIT, HAND TOOLS

Product Brochure - Hand Tools - CLICK HERE