Collection: AMAT Mirra

FABS DOOR SOLENOID ASSY

Z-AXIS MOTOR AND ENCODER ASSY, W/O BRACKET UPGRADE

SPINDLE PLUG, MIRRA UPA CALIBRATION FIXTURE

Mirra UPA Upgrade - CLICK HERE

Mirra UPA Upgrade Video - CLICK HERE

Product Brochure - Hand Tools - CLICK HERE

MIRRA HCLU 150MM REFURBISHED READY TO SHIP UNIT.  WITH ASSEMBLY TEFLON COATING (EXCHANGE CORE NOT RECEIVED)

HCLU Refurbishment Brochure - CLICK HERE

HCLU Refurbishment Video - CLICK HERE

MIRRA HCLU 150MM REFURBISHMENT, WITH ASSEMBLY TEFLON COATING

HCLU Refurbishment Brochure - CLICK HERE

HCLU Refurbishment Video - CLICK HERE

PROFILER UPA COVERSION KIT FOR 1 MIRRA SPINDLE (4 ZONE)

Mirra UPA Upgrade - CLICK HERE

Mirra UPA Upgrade Video - CLICK HERE

PAD CONDITIONER HEAD FLEXURE, DDF3, ENTREPIX UPGRADE

ALTERNATE SUBSTRATE WAFER SLIP DETECTION SENSOR KIT

Alternate Substrate Wafer Slip Detection Sensor Kit - CLICK HERE

Alternate Substrate Wafer Slip Detection Sensor Kit Video - CLICK HERE

200mm (8") TITAN 24K COMPLETE REBUILD AND TEST SERVICE

6" TITAN WAFER BREAKAGE REDUCTION COMPLETE 24K REBUILD AND TEST SERVICE

200mm (8") PROFILER 24K COMPLETE REBUILD AND TEST SERVICE

MIRRA, 2 STATION VIDEO KEYBOARD MOUSE EXTENDER SWITCHING UPGRADE KIT, 75 FT EXTENSION

MIRRA, ENTREPIX SOLID STATE HARD DRIVE UPGRADE KIT FORMATED FOR NT NARROW SCSI

ENTREPIX COMPACT FLASH DRIVE FOR MIRRA UPGRADE KIT, NARROW SCSI, NT FORMATED

MIRRA WET ROBOT FLEX TRACK REPAIR / REPLACEMENT KIT FOR ALL LENGTHS

Mirra Wet Robot Refurbishment & Upgrade

Mirra Wet Robot Refurbishment & Upgrade Video

OBSOLETE, SEE 340-140-11931, ENTREPIX UPGRADED HCLU TRANSDUCER REPLACES 0090-01603

ASSY, CLEAR PAD CONDITIONER ARM COVER W/TABS

Pad Conditioner Clear Arm Cover - CLICK HERE

Pad Conditioner Clear Arm Cover Video - CLICK HERE

Entrepix Concierge Quarterly Pad Conditioner Service Video - CLICK HERE

MIRRA WET ROBOT X AXIS MOTOR AND GEARHEAD ASSY, WITH BLACK ECOSEAL CONNECTOR

Mirra Wet Robot Refurbishment & Upgrade

Mirra Wet Robot Refurbishment & Upgrade Video

ENTREPIX 200MM PROFILER HEAD ASSY

4 Zone Profiler Head - CLICK HERE

4 Zone Profiler Head Video - CLICK HERE

MIRRA WET ROBOT, X AXIS, DRIVEN SIDE, PULLEY ASSEMBLY

Mirra Wet Robot Refurbishment & Upgrade

Mirra Wet Robot Refurbishment & Upgrade Video

MIRRA WET ROBOT, X AXIS IDLER SIDE

ASSY, HARMONIC DRIVE, DDF3 PAD CONDITIONER BASE (200MM AND 300MM)

ENTREPIX ROTATION HEAD MOTOR / DRIVER COMBO UPGRADE WITH UPA BRACKET

Head Rotation Motor & Driver - CLICK HERE

Head Rotation Motor & Driver Video - CLICK HERE

ASSY, WET ROBOT DOOR, LEFT ( SLIDING WINDOW )