Collection: AMAT Mirra

HUB RING

MIRRA TITAN HEAD GIMBAL ROD, 200MM

20" POLISH PAD PROTECTOR TOOL

MIRRA, GIMBAL, 200MM, TITAN II, PROFILER HEAD

4 Zone Profiler Head - CLICK HERE

4 Zone Profiler Head Video - CLICK HERE

CLEAR COVER, MIRRA WET ROBOT ARM HOUSING

Mirra Wet Robot Refurbishment & Upgrade

Mirra Wet Robot Refurbishment & Upgrade Video

MIRRA JAM NUT WET ROBOT Z AXIS LEAD SCREW

Mirra Wet Robot Refurbishment & Upgrade

Mirra Wet Robot Refurbishment & Upgrade Video

MOD, RETAINING RING, 150mm BREAKAGE REDUCTION REV 2

SHAFT, GEAR, DDF3 ROTATION, KEYED, SINGLE NUT FASTENER 200MM AND 300MM DDF3

O-RING, PAD CONDITIONER COVER RED SILICONE

MAIN SHAFT, HCLU

MIRRA CARBON FIBER DRY FABS ROBOT BLADE UPGRADE, END EFFECTOR

BRACKET, PEDESTAL, ETPX ( PLASTIC VERSION )

OBSOLETE....TRANSDUCER, -15 TO +10PSIG, 0-10V TR.1/8"NPTM SS-FITTING

HEAD PNEUMATIC CONTROLLER PCB, TITAN / PROFILER, UPA ELECTRONICS

Mirra UPA Upgrade - CLICK HERE

Mirra UPA Upgrade Video - CLICK HERE

DOOR OPERATED INTERLOCK SWITCH SPDT 15A 125VAC

ENTREPIX COVER PANEL SAFETY SWITCH

MIRRA FABS PC / TEACHING TOGGLE SWITCH

MIRRA WET ROBOT LIMIT AND HOME SENSOR PCB

Mirra Wet Robot Refurbishment & Upgrade

Mirra Wet Robot Refurbishment & Upgrade Video

MIRRA DUAL WAFER LOSS SENSOR PCB

Wafer Loss Sensor Silicon Substrate Upgrade - CLICK HERE

Wafer Loss Sensor Silicon Substrate Upgrade Video - CLICK HERE

MIRRA WET ROBOT, ENTREPIX CABLE ASSY, ROBOT 75" POWER

MIRRA WET ROBOT, ENTREPIX CABLE ASSY ROBOT ENCODER 75"

MIRRA WET ROBOT ASSY, CABLE, ROBOT POWER 112"

MIRRA WET ROBOT ASSY, CABLE, ROBOT ENCODER 112"

ENTREPIX UPGRADED WET ROBOT MOTOR DRIVER ( MUST HAVE ENTREPIX UPGRADE 340-120-11518 TO USE THIS PART )

Mirra Wet Robot Refurbishment & Upgrade - CLICK HERE

Mirra Wet Robot Refurbishment & Upgrade Video - CLICK HERE

Mirra Wet Robot Motor Driver Upgrade - CLICK HERE

Mirra Wet Robot Motor Driver Upgrade Video - CLICK HERE