Collection: AMAT Mirra

ENTREPIX ASSY PCB, MIRRA WET ROBOT WRIST/ WAFER MAPPING UPGRADE WITH ROUND 5 PIN ONNECTOR OPTION

Mirra Wet Robot Refurbishment & Upgrade

Mirra Wet Robot Refurbishment & Upgrade Video

ENTREPIX AC/DC CONVERTER 48V 240W 5A

CYLINDER, MAIN LIFT CUP

ENTREPIX 4 PORT ROTARY UNION FOR PROFILER UPA ASSY

MIRRA WET TANK FILL VALVE 1/2" X 1/2" FNPT PORT AND 1/8 FNPT PNEU WITH MICRO ADJUST BYPASS ( WHITE FURON )

FABS ERGO DOOR SHOCK ABSORBER

TBG, FLEX .25IN ID NORPRENE TUBING #24, SLURRY PUMP

BRUSH, SLURRY PUMP MOTOR 12V

SEAL HEAD ASSY UNIVERSAL 3 SCREW

CLAMP, HCLU BELLOWS, ADJUSTABLE

6" PEDESTAL POLITEX HCLU PAD

USE ALTERNATE 340-340-11057 DDF3 SILICONE DIAPHRAGM DDF3 HEAD

MIRRA PAD CONDITIONER HEAD ROTATION BELT, DDF3

Entrepix Concierge Quarterly Pad Conditioner Service Video - CLICK HERE

MIRRA WET ROBOT GASKET, BLADE, END EFFECTOR

Mirra Wet Robot Refurbishment & Upgrade - CLICK HERE

Mirra Wet Robot Refurbishment & Upgrade Video - CLICK HERE

Mirra Wet Robot Blade Pad - CLICK HERE

RING, RETAINING, 150MM TITAN HEAD ERTALYTE

6  DF200 PAD"

BELLOWS, HCLU, FOR USE ON MIRRA AND REFLEXION PLATFORMS ( AKA 0020-79027 )

HCLU PEDESTAL PAD 8"

RING, RETAINING, 200MM, ERTALYTE

HCLU, PAD, BREAKAGE REDUCTION, 150MM

PERFORATED PLATE PAD WAFER BREAKAGE REDUCTION (5.6" DIA.) 150MM TITAN

JAW SEAL

ENTREPIX DECHUCK BLADDER TITAN INNER TUBE

ENTREPIX TITAN SILICONE MEMBRANE 8" TITAN