Collection: AMAT Mirra

UPPER STANDARD PLATEN REWORKED WITH SUPER FINSH AND TEFLON COATING, READY TO SHIP (NO CORE RECEIVED) 20" DIA

Platen Refurbishment & Teflon Coating - CLICK HERE

Platen Refurbishment & Teflon Coating Video - CLICK HERE

UPPER STANDARD PLATEN REWORKED WITH SUPER FINISH AND TEFLON COATING  - REFURBISHED, 20" DIA

Platen Refurbishment & Teflon Coating - CLICK HERE

Platen Refurbishment & Teflon Coating Video - CLICK HERE

*USE ALT WHEN OOS * 340-130-10789 PNEUTRONICS COVER

* USE 340-130-10998 GIMBAL,200MM TITAN II HEAD

COVER,CROSS COVER, UNIVERSAL

USE ENTREPIX UPGRADE 340-120-11519 CARBON FIBER UPGRADE ) *ROBOT BLADE (SEAL ON BACK SIDE), END EFFECTOR

REWORKED STANDARD PLATEN WITH SUPER FINSH AND TEFLON COATING  ( CORE NOT RECEIVED ), 20" DIA ( ALSO SEE UPGRADE 340-130-11660 FOR NEW PLATEN OPTION )

Platen Refurbishment & Teflon Coating - CLICK HERE

Platen Refurbishment & Teflon Coating Video - CLICK HERE

REWORKED STANDARD PLATEN WITH SUPER FINISH AND TEFLON COATING, 20" DIA

Platen Refurbishment & Teflon Coating - CLICK HERE

Platen Refurbishment & Teflon Coating Video - CLICK HERE

PLATEN WATER COOLED, WITH SUPER FINISH AND TEFLON COATING, READY TO SHIP, 20" DIA

Platen Refurbishment & Teflon Coating - CLICK HERE

Platen Refurbishment & Teflon Coating Video - CLICK HERE

PLATEN WATER COOLED, WITH SUPER FINISH AND TEFLON COATING   - REFURBISHMENT SERVICE, 20" DIA

Platen Refurbishment & Teflon Coating - CLICK HERE

Platen Refurbishment & Teflon Coating Video - CLICK HERE

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-120-10827. SPINDLE PLUG

Product Brochure - Hand Tools - CLICK HERE

PLEASE USE ALTERNATE PART 340-130-11424 MAIN SHAFT, HCLU

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-120-10839. ASSY, PAD CONDITIONER HEAD FLEXTURE

PLATE - OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-130-10450

MINITURE CABLE PLUG TO DIN 43650

OBSOLETE - SEE ENTREPIX UPGRADE REPLACEMENT 340-120-10482. ASSY, MOTOR/ENCODER, WET ROBOT

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-120-10812. MIRRA FACILITIES PRESSURE SENSOR ASSY

ASSY, EXHAUST FAN

HCLU/PEDESTAL SENSOR ASSY

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-120-10691. MIRRA WET ROBOT SHOULDER HOME SENSOR ASSY

SENSOR HOME LIMIT ASSY ( SLURRY ARM OR PAD COND )

COVER INTERLOCK KEY SWITCH

OBSOLETE - PLEASE USE ENTREPIX REPLACEMENT UPGRADE 340-120-11220. ASSY, HCLU PEDESTAL VACUUM TRANSDUCER

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT. 340-130-10637. ITTRANSDUCER TITAN UPGRADE ASSY