Collection: AMAT Mirra

OBSOLETE USE 340-130-10639 MEM PRESSURE TRANSDUCER, PP

OBSOLETE - USE 340-130-10638 RR PRESSURE TRANSDUCER

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-130-10639. PP TRANSDUCER, TITAN, UPGRADE, ASSY

OBSOLETE PART NUMBER -SEE ENTREPIX UPGRADE REPLACEMENT 340-120-10812. MIRRA FACILITIES PRESSURE SENSOR ASSY

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-120-10688. SLIP RING WITH HARNESS

OBSOLETE - SEE ENTREPIX UPGRADE REPLACEMENT 340-120-10483. WET ROBOT Z MOTOR/ENCODER UPGRADE WITH CABLE STRAIN RELIEF KIT

OBSOLETE - SEE ENTREPIX UPGRADE REPLACEMENT 340-120-10482. ASSY, MOTOR, WERT ROBOT, SHOULDER

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-120-10686. ENTREPIX STANDARD FLOW RATE SLURRY PUMP #24 TBG

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-120-10608. UC TRANSDUCER, PROFILER UPGRADE, ASSY

OBSOLETE - SEE ENTREPIX UPGRADE REPLACEMENT 340-120-10608. IC TRANSDUCER, PROFILER UPGRADE, ASSY

OBSOLETE - SEE ENTREPIX UPGRADE REPLACEMENT 340-120-10606. EC TRANSDUCER, PROFILER UPGRADE, ASSY

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-130-10638. RR TRANSDUCER, TITAN, UPGRADE, ASSY

OBSOLETE- SEE ENTREPIX UPGRADE 340-140-10995. MIRRA LOWER PNEUTRONICS PCB

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-140-10993. MIRRA WET ROBOT LIMIT AND HOME SENSOR PCB

Mirra Wet Robot Refurbishment & Upgrade

Mirra Wet Robot Refurbishment & Upgrade Video

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-140-10599. HEAD PNEMATIC CONTROLLER PCB, TITAN / PROFILER

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-140-10994. MIRRA DUAL WAFER LOSS SENSOR PCB

Wafer Loss Sensor Silicon Substrate Upgrade - CLICK HERE

Wafer Loss Sensor Silicon Substrate Upgrade Video - CLICK HERE

OBSOLETE - PLEASE USE ENTREPIX UPGRADE 340-140-11304. ASSY PCB, ROBOT WRIST/WAFER MAPPING INTC (WITH ROUND CONNECTOR)

ASSY, PCB CMP ANALOG BD ISRM

ANALOG IO PROFILER P2 - UPA CABLE (E-CHAINFLEX HEAD & USER CONFIG, ANALOG I)

OBSOLETE - SEE ENTREPIX UPGRADE REPLACEMENT 340-140-11003 . CABLE ASSY, ROBOT 75" POWER ( ACT. 92 INCH)

OBSOLETE - USE ENTREPIX REPLACEMENT UPGRADE PART 340-140-11005. CABLE ASSY, ROBOT POWER 112" (ACT.132 INCH).

ROBOT WRIST FLEX CABLE, NEW OEM STYLE

CABLE HD ROT1-4 MTR DRIVER RESOLVER

CABLE HD SWP1-4 MOTOR, DRIVER

Remote UPA Upgrade - CLICK HERE

Remote UPA Upgrade Video - CLICK HERE