Collection: AMAT Mirra

FURON 2 WAY VAVLE NC 1/4 FNPT

PNEUMATIC DIA VALVE 3-WAY 1/4FNPT PFA FOR PAD CONDITIONER

VALVE MANUAL EXHAUST 10-32 PORTS SST W/NYL TOGGLE

3-WAY VALVE ( AV3 )

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-120-10683. BURKERT UPA SOLENOID VALVE ASSY

Mirra UPA Upgrade - CLICK HERE

Mirra UPA Upgrade Video - CLICK HERE

SMC VALVE SOL 2POS DBL 24V 3WAY

SEAL WASHER 5/16" BOLT SIZE .301 ID, .603" OD .050" THK

VEEJET SPRAY NOZZLE 1/8 NPT KYNAR .040 ORF ( SLURRY ARM HPR SPRAY )

PEDESTAL TEFLON BALL

SCREW, BHCS, 8-32 X .38, 316SS

O-RING 6.8 X 1.9 ( USED ON BASE OF ENTREPIX MIRRA UPA REGULATOR UPGRADE )

MALE ELBOW 5/32 X 10-32

MALE ELBOW 1/4 X 1/8 MNPT

FTG, UNION WYE,3/8",PUSH FIT

MIRRA SLURRY DRAWER SLIDES - SST

FURON TEFLON NEEDLE VALVE 1/4"

FABS DRY CLEAN ROBOT (RORZE) REFURBISHMENT SERVICE

SCSI ADAPTER - HD-68 FEMALE TO IDC-50 FEMALE, INTERNAL, SE

SPRING-LOADED PTFE SEAL FOR .50 ID X.688 OD SHAFTS

TBG, FLEXIBLE

BLANKING PLATE FOR SMC VQ1000 SERIES

OBSOLETE SEE ENTREPIX UPGRADE 340-120-10631

OBSOLETE - SEE 340-120-10631 WAFER LOSS SENSOR ASSY

Wafer Loss Sensor Silicon Substrate Upgrade - CLICK HERE

Wafer Loss Sensor Silicon Substrate Upgrade Video - CLICK HERE

DDF3 HEAD ASSEMBLY, PAD CONDITIONER, TEFLON COATED, REFURBISHED EXCHANGE

Pad Conditioner Head Rebuild Exchange - CLICK HERE

Pad Conditioner Head Rebuild Exchange Video - CLICK HERE

Entrepix Quarterly Pad Conditioner Service Video - CLICK HERE