Collection: AMAT Mirra

SEE ENTREPIX UPGRADE 340-120-10631 SENSOR PHOTO REF. .20CM 12/2

PLEASE SEE ENTREPIX UPGRADE 340-120-11518 , ASSY, 2 PHASE DRIVER FOR WET ROBOT ARM

Mirra Wet Robot Refurbishment & Upgrade - CLICK HERE

Mirra Wet Robot Refurbishment & Upgrade Video - CLICK HERE

Mirra Wet Robot Motor Driver Upgrade - CLICK HERE

Mirra Wet Robot Motor Driver Upgrade Video - CLICK HERE

SEE ENTREPIX UPGRADE 340-120-10631 WAFER LOSS SENSOR ASSY, 4PIN CONN

Wafer Loss Sensor Silicon Substrate Upgrade - CLICK HERE

Wafer Loss Sensor Silicon Substrate Upgrade Video - CLICK HERE

PLEASE SEE ALT PART NUMBER 0010-77157-RNC MIRRA KIT HCLU 200MM LOADCUP

MIRRA UPGRADED DI WATER HIGH FLOW MANIFOLD ASSY, COARSE NUT CONFIGURATION

MIRRA HEAD ROTATION SPINDLE, REFURBISHED EXCHANGE ASSY.

Mirra Rotation Spindle Refurbishment - CLICK HERE

Mirra Rotation Spindle Refurbishment Video - CLICK HERE

PAD CONDITIONER SUPPORT ARM WITH TEFLON - EXCHANGE UNIT READY TO SHIP

Pad Conditioner Teflon Coating - CLICK HERE

Pad Conditioner Teflon Coating Video - CLICK HERE

Entrepix Concierge Quarterly Pad Conditioner Service Video - CLICK HERE

MIRRA PAD CONDITIONER HEAD TEFLON COATING READY TO SHIP EXCHANGE SERVICE

Pad Conditioner Teflon Coating - CLICK HERE

Pad Conditioner Teflon Coating Video - CLICK HERE

Entrepix Concierge Quarterly Pad Conditioner Service Video - CLICK HERE

ASSY, ETPX REMOTE UPA UPGRADE ( WITHOUT UPA ELECTRONICS )

Remote UPA Upgrade - CLICK HERE

Remote UPA Upgrade Video - CLICK HERE

Mirra UPA Upgrade - CLICK HERE

Mirra UPA Upgrade Video - CLICK HERE

200MM PROFILER, EXTERNAL MEMBRANE OUTER RING, EDGE CONTROL RING

200MM PROFILER, INTERNAL MEMBRANE INNER RING

200MM PROFILER, TOP ASSY CAP

200MM PROFILER, CENTER HOUSING, LOWER HOUSING

200MM PROFILER, EXTERNAL MEMBRANE INNER RING, SUPPORT, AF MEMBRANE

200MM PROFILER, TOP ASSY CENTER SECTION

200MM PROFILER, TOP HAT

200MM PROFILER, UPPER HOUSING, OUTER CLAMP, TEFLON COATED

ENTREPIX HEAD SWEEP DRIVER BRACKET ASSEMBLY

Head Sweep Motor & Driver Video - CLICK HERE

Head Sweep Motor & Driver Brochure - CLICK HERE

ENTREPIX HEAD SWEEP DRIVER UPGRADE ONLY

Head Sweep Motor & Driver Video - CLICK HERE

Head Sweep Motor & Driver Brochure - CLICK HERE

ENTREPIX HEAD SWEEP MOTOR UPGRADE ASSEMBLY MOTOR AND DRIVER MUST BE REPLACED TOGETHER, NOT COMPATIBLE WITH OEM MOTOR OR DRIVER)

Head Sweep Motor & Driver Video - CLICK HERE

Head Sweep Motor & Driver Brochure - CLICK HERE

OBSOLETE, SEE 340-340-11017, MEMBRANE, 200MM (8 INCH) TITAN HEAD, BLACK EPDM

MOTOR AND DRIVER HEAD SWEEP ONE SPINDLE UPGRADE KIT (MOTOR AND DRIVER MUST BE REPLACED TOGETHER, NOT COMPATIBLE WITH OEM MOTOR OR DRIVER)

Head Sweep Motor & Driver Video - CLICK HERE

Head Sweep Motor & Driver Brochure - CLICK HERE

SERVO MOTOR, HEAD ROTATION, 7.5A, 88n-M 220 VAC ( W/O BRACKET ) ( FOR COMPLETE MOTOR / DRIVER UPGRADE ORDER 340-120-11439 ) 0190-63686

SERVO DRIVER, HEAD ROTATION, 220VAC, 10V ANALOG ( DRIVER ONLY.  FOR COMPLETE MOTOR DRIVER UPGRADE PLEASE ORDER 340-120-11439 ) 0190-63687 s