AMAT Mirra

  • 340-130-10720

    340-130-10720

    340-130-10720

    HCLU WAFER PEDESTAL BASE CENTER CAP
  • 0020-77426

    0020-77426

    Available on Request

    0020-77426

    USE ENTREPIX 340-130-10720 WAFER BASE CENTER

    Available on Request
  • 340-340-11635

    340-340-11635

    340-340-11635

    WET ROBOT TIMING BELT, X-TRACK (124 INCH LENGTH) X AXIS (FOR STAND ALONE TOOL)

    Mirra Wet Robot Refurbishment & Upgrade

     

    Mirra Wet Robot Refurbishment & Upgrade Video

  • 340-340-11634

    340-340-11634

    Available on Request

    340-340-11634

    WET ROBOT TIMING BELT, X-TRACK (148.4 INCH LENGTH) X AXIS (FOR MIRRA INTEGRATED TOOL)

    Mirra Wet Robot Refurbishment & Upgrade

     

    Mirra Wet Robot Refurbishment & Upgrade Video

    Available on Request
  • 340-120-11623

    340-120-11623

    Available on Request

    340-120-11623

    MIRRA SLURRY FLOW MONITORING UPGRADE KIT 1 SLURRY TYPE 3 PLATENS,  ( CALL OR EMAIL PARTS TO ADD ADDITIONAL FLOW SENSORS, UP TO 6 LINES )

    Mirra Slurry Flow Monitoring Upgrade - CLICK HERE

     

     

    Available on Request
  • 340-130-11601

    340-130-11601

    340-130-11601

    MIRRA WET ROBOT, DOOR TRACKS TOP OR BOTTOM
  • 0021-79279

    0021-79279

    Available on Request

    0021-79279

    OBSOLETE - PLEASE USE 340-130-10713  DENTENT EXT SLURRY DISPENSE ARM
    Available on Request
  • 340-130-10713

    340-130-10713

    340-130-10713

    DETENT, SLURRY DISPENSE ARM
  • 340-130-10255

    340-130-10255

    Available on Request

    340-130-10255

    CROSS TOP CLEAR PLASTIC BRACKET COVER, TRIANGLE

    Available on Request
  • 0040-77206

    0040-77206

    Available on Request

    0040-77206

    OBSOLETE USE 340-130-10255 CROSS COVER TOP PLASTIC BRACKET

    Available on Request
  • 0021-77498

    0021-77498

    0021-77498

    BOWL, CLEAN CUP, PAD CONDITIONER, MIRRA 200MM

  • 0040-77211

    0040-77211

    Available on Request

    0040-77211

    SPLASH GUARD, FRONT LEFT, STANDARD PAD CONDITIONER

    Available on Request
  • 0020-78393

    0020-78393

    Available on Request

    0020-78393

    ALTERNATE AVAILABLE  - USE 340-340-11078 ,ROLLING SEAL 150MM TITAN 2 HEAD
    Available on Request
  • 0022-77178

    0022-77178

    0022-77178

    FRONT CORNER GUARD SHORT SIDE
  • 0020-79207

    0020-79207

    0020-79207

    ADAPTER, ASSY, LOWER PLATEN
  • 340-130-11363

    340-130-11363

    340-130-11363

    PAD CONDITIONER BASE GASKET WITH ADHESIVE BACKING
  • 0190-14373

    0190-14373

    Available on Request

    0190-14373

    DRIVER, SERVOMOTOR, 200V 200W

    Available on Request
  • 0870-01038

    0870-01038

    Available on Request

    0870-01038

    DRIVER, SERVO MOTOR 200V 100W PAD CONDITIONER

    Available on Request
  • 1080-01170

    1080-01170

    1080-01170

    PLATEN MOTOR

  • 0870-01023

    0870-01023

    Available on Request

    0870-01023

    DRIVER, SERVOPACK, PLATEN

    Available on Request
  • 340-340-11703

    340-340-11703

    Available on Request

    340-340-11703

    CARRIER FILM, 8", TUNGSTEN PLUS HEAD W+ (REPLACES AMAT 0022-77517)

    Available on Request
  • 340-120-11711

    340-120-11711

    Available on Request

    340-120-11711

    TITAN HEAD, 200MM, TESTED WITH STANDARD CONSUMABLES

    Available on Request
  • 340-130-11689

    340-130-11689

    340-130-11689

    PERFORATED MEMBRANE SUPPORT, 200MM TITAN HEAD

  • 340-130-11688

    340-130-11688

    340-130-11688

    MEMBRANE CLAMP, 200MM TITAN HEAD