Collection: AMAT Mirra

FLEXURE CLAMP, 200MM TITAN HEAD

OUTER CLAMP, 200MM TITAN HEAD

BLADDER CLAMP, 200MM TITAN HEAD

CARRIER PLATE, 200MM TITAN HEAD

GIMBAL ROD, 200MM TITAN HEAD

SENSOR VALVE, WAFER ABSENT, 200MM TITAN HEAD

SENSOR PLUNGER, WAFER ABSENT, 200MM TITAN HEAD

INNER CLAMP, 200MM TITAN HEAD

MANIFOLD FLANGE, 200MM TITAN HEAD

MANIFOLD ASSEMBLY, 200MM TITAN HEAD

DI WATER CLEAN SPRAY SYSTEM FOR MIRRA POLISHER, UPGRADE KIT

ENTREPIX PAD CONDITIONER MOTOR DRIVER UPGRADE

ENTREPIX PAD CONDITIONER SWEEP MOTOR UPGRADE

ENTREPIX PAD CONDITIONER ROTATION MOTOR UPGRADE

Requires purchase of upgraded motor driver, reuses factory cabling.  Includes gearbox preinstalled on motor for direct bolt-in fitment.  

ENTREPIX HEAD TESTER, GEN 2, 6 ZONE

HEAD TESTER, GEN 2, 8 ZONE

NEW MIRRA UPPER POLISH  PLATEN, TEFLON COATED, STANDARD NON-TEMP CONTROL

New Mirra Teflon Coated Polish Platen Information - CLICK HERE

MIRRA CROSS SHIELD END, TEFLON COATED MIRRA CROSS SHIELD END

SHIELD, CROSS INNER, MIDDLE UNDER TEFLON COATED

ASSY, MIRRA QUEUE RAIL, ENTEGRIS A200 PFA CASSETTES

OVERRIDE SWITCH, PAD CONDITIONER DISK POS, 300MM PLI/REFLEXION

MIRRA PAD CONDITINER UPGRADED HEAD TRAVEL SLEEVE

PLATEN, UPPER, WATERCOOLED

CLICK HERE to view additional Entrepix Mirra platen parts!