Collection: AMAT Mirra

TITAN HEAD 200MM DIAPHRAM SEAL

KEY SPACER TRAVEL HUB, USE ALTERNATIVE 340-130-10535

OBSOLETE USE 340-120-11237 PAD CONDITIONER HOUSING COVER

SUPPORT PAD MEMBRANE

O-RING, PAD CONDITIONER COVER, 11.41IDX .070 C/S VITON 75 SPLICED (UPGRADE AVAIL 340-130-11364 RED SILICON)

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-130-10453. PAD CONDITIONER HEAD DDF3 OUTER CLAMP O-DOM

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-130-10456. DDF3 BEARING SPACER

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-130-10458. PAD CONDITIONER HEAD DDF3 O-BEARG CLAMP METAL RING

BLACK EPDM DIAPHRAGM, DDF3 ( SILICON PART ALTERNATE ALSO AVAILABLE )

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-340-10528. HCLU PEDESTAL PAD 8"

MEMBRANE FLEXURE, 6" TITAN HEAD (BLACK)

O-RING, DDF3, HEAD ASSY, TOP

NOZZLE BLOCK, FOR CLEAN CUP

OBSOLETE PART NUMBER -SEE ENTREPIX UPGRADE REPLACEMENT 340-130-10254. SUPPORT PAD MEMBRANE

INNER TUBE, 6" TITAN HEAD ORANGE, ALTERNATE AVAILABLE 340-340-11079

DDF3 IC4 NUT

* SEE PART ALT OPTION 340-130-10489 * GIMBAL BASE

OBSOLETE PART NUMBER -SEE ENTREPIX UPGRADE REPLACEMENT 340-130-10459. PAD CONDITIONER GIMBAL SEAL CLAMP

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-340-10257. SEAL HEAD ASSY, PAD CONDITIONER UNIVERSAL 3 SCREW FASENTING

PAD FOR FABS END EFFECTOR

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-340-10296. GASKET, ROBOT BLADE

Mirra Wet Robot Blade Pad - CLICK HERE

OBSOLETE PART NUMBER - SEE ENTREPIX UPGRADE REPLACEMENT 340-130-10254. SUPPORT PAD MEMBRANE

* USE ENTREPIX UPGRADE 340-120-11519 CARBON FIBER UPGRADE ) WAFER BLADE, ONE PIECE WELDED, END EFFECTOR

UPGRADE AVAILABLE USE PART 340-120-11519 WAFER BLADE, ONE PIECE WELDED, USED